Equipment Info
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Customized Plasma-Powder ALD station
2026.04.23 518 -
Customized Thermal ALD Station -1&2
2026.04.23 51 -
Plasma-Enhanced ALD(CCP type) (ISAC)
2026.04.23 51 -
Customized UV-ALD station
2026.04.23 38 -
Customized Plasma-Enhanced ALD (HCP type)
2026.04.23 40 -
RF,DC - Sputter(KVS2000)
2026.04.23 25 -
Customized Powder ALD Modulation
2026.04.22 59 -
Battery Charge–Discharge Cycler
2026.04.22 25 -
Battery Fabrication Cleanroom
2026.04.22 33
