Equipment Info
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Customized Plasma-Powder ALD station
2026.04.23 551 -
Customized Thermal ALD Station -1&2
2026.04.23 69 -
Plasma-Enhanced ALD(CCP type) (ISAC)
2026.04.23 66 -
Customized UV-ALD station
2026.04.23 53 -
Customized Plasma-Enhanced ALD (HCP type)
2026.04.23 57 -
RF,DC - Sputter(KVS2000)
2026.04.23 39 -
Customized Powder ALD Modulation
2026.04.22 99 -
Battery Charge–Discharge Cycler
2026.04.22 40 -
Battery Fabrication Cleanroom
2026.04.22 48
