EQUIPMENTS
Directly available at ENTeR lab
Customized thermal ALD Station -1
CeO2, Fe2O3
Customized Powder ALD Station -1
LiO2, MoO3, ZrO2, Al2O3
UV-ALD station
TBD
Plasma-Powder ALD station
ZrO2, Nb2O5
Glove box
Roll press
Doctor blade
Electrode punching machine (Coin cell)
Slurry mixer
Vacuum oven
Plasma-Enhanced ALD(CCP type) (ISAC)
Zirconium Dioxide (ZrO2), Titanium Dioxide (TiO2), Aluminium Oxide(Al2O3), Hafnium Oxide(HfO2)
Customized Plasma-Enhanced ALD(HCP type)
Pt
RF,DC - Sputter(KVS2000)
Metal target : Pt,Ru,Ni,Ti,Al,Cu,Au
Oxide target : YSZ,SDC,Zr/Y,ITO
Ellipsometer (FS-1EXG2)
SOFC station (Customized)
Gas : H2, CH4
SOEC station (Customized)
Gas : Steam electrolysis
Potentiostat(BioLogic)
LCR meter (Wayne Kerr LCR meter - 4100)
Source meter (Keithley 2636 Sourcemeter)
Customized SOFC probe station (EC-LAB)
Tube Furnace
Furnace